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Title:
A MEMS toolkit for metal-oxide-based gas sensing systems
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Thin Solid Films [0040-6090] Müller, G yr:2003
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Müller, G
Friedberger, A
Kreisl, P
Ahlers, S
Schulz, O
Becker, T
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Müller, G
Friedberger, A
Kreisl, P
Ahlers, S
Schulz, O
Becker, T
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author:
Müller, G
Friedberger, A
Kreisl, P
Ahlers, S
Schulz, O
Becker, T
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