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Title:
Dual magnetron sputtering (DMS) system with sine-wave power supply for large-area coating
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Surface & Coatings Technology [0257-8972] Kirchhoff, V yr:1998
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Kirchhoff, V
Kopte, T
Winkler, T
Schulze, M
Wiedemuth, P
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Kopte, T
Winkler, T
Schulze, M
Wiedemuth, P
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Kirchhoff, V
Kopte, T
Winkler, T
Schulze, M
Wiedemuth, P
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