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Title:
Phase formation and microstructure evolution of reactively r.f. magnetron sputtered Cr–Zr oxynitride thin films
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Surface & Coatings Technology [0257-8972] Spitz, Stefanie yr:2013
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"Combination of an atmospheric pressured arc reactor and a magnetron sputter device for the synthesis of novel nanostructured thin films."
Thin solid films
689: 137528-.
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Spitz, Stefanie
Stueber, Michael
Leiste, Harald
Ulrich, Sven
Seifert, Hans J
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Stueber, Michael
Leiste, Harald
Ulrich, Sven
Seifert, Hans J
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Spitz, Stefanie
Stueber, Michael
Leiste, Harald
Ulrich, Sven
Seifert, Hans J
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