Language
English
German
^M
Dutch
Spanish
Title:
Fabrication of a silicon-Pyrex-silicon stack by a.c. anodic bonding
Source:
Sensors and Actuators A-Physical [0924-4247] Despont, M yr:1996
Basic
Full text
Full text available via
EZB-NALI5-00465 Elsevier Archive NL
Year:
Volume:
Issue:
Start Page:
Document delivery
Request document via
Library/Bibliothek
Users interested in this article also expressed an interest in the following:
description
1.
ALBAUGH, K.
"IRREVERSIBILITY OF ANODIC BONDING."
Materials letters
4.11-12 (1986): 465-469.
description
2.
Plaza, J.A. A.
"Non-destructive in situ test for anodic bonding."
Sensors and actuators. A, Physical
60.1-3 (1997): 176-180.
description
3.
Ahmed, M.
"Adhesive-free bonding of Zerodur glass to silicon."
Applied Surface Science
252.20 (2006): 7327-30.
description
4.
Zhao, J.
"Bonding quartz wafers by the atom transfer radical polymerization of the glycidyl methacrylate at mild temperature."
Sensors and actuators. A, Physical
135.1 (2007): 257-261.
description
5.
Akiyama, Y.
"Rapid bonding of Pyrex glass microchips."
Electrophoresis
28.6 (2007): 994-1001.
description
6.
Visser, M.M. M.
"Chemical analysis of bonded and debonded silicon-glass interfaces."
Journal of Micromechanics and Microengineering
11.5 (2001): 1-6.
description
7.
Cooper, RF.
"The mechanism of oxidation of a basaltic glass: Chemical diffusion of network-modifying cations."
Geochimica et cosmochimica acta
60.17 (1996): 3253-3265.
description
8.
Iles, A.
"Bonding of soda-lime glass microchips at low temperature."
Microfluidics and nanofluidics
3.1 (2007): 119-122.
description
9.
LASKY, J.
"WAFER BONDING FOR SILICON-ON-INSULATOR TECHNOLOGIES."
Applied physics letters
48.1 (1986): 78-80.
description
10.
Plaza, J.
"Effect of silicon oxide, silicon nitride and polysilicon layers on the electrostatic pressure during anodic bonding."
Sensors and actuators. A, Physical
A67.1 (1998): 181-184.
description
11.
Yu, W. H.
"Controlled Grafting of Well-Defined Epoxide Polymers on Hydrogen-Terminated Silicon Substrates by Surface-Initiated ATRP at Ambient Temperature."
Langmuir
20.19 (2004): 8294-8300.
View More...
View Less...
Select All
Clear All
Save Citations
Select Format
ProCite
Reference Manager
RefWorks
EndNote
Submit citation export
Advanced
Author
Other articles by this author? -- in
GeoRef
author:
Despont, M
Gross, H
Arrouy, F
Stebler, C
Staufer, U
last name
initials
Other articles by this author? -- in
Online Contents Geosciences
author:
Despont, M
Gross, H
Arrouy, F
Stebler, C
Staufer, U
last name
initials
Other articles by this author? -- using
Web of Science
author:
Despont, M
Gross, H
Arrouy, F
Stebler, C
Staufer, U
last name
initials
Web Search
Find related information in
a Web Search Engine
Excite
Google
HotBot
Ixquick
ZOO
Ask
Yahoo!
Bing
Naver
Search Terms:
Search for related information in
Google Scholar
Article Title
Author Name
Journal Title
Other Search
Search Terms:
A service provided by the
Library of the Wissenschaftspark Albert Einstein
, Potsdam, Germany.
© 2005 SFX by Ex Libris Inc.