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Title: BF2+ ion implantation in strained-Si/SiGe/Si hetero-structures
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Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms [0168-583X] Morioka, J yr:2006


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1. WALKER, AJ. "SHALLOW BORON JUNCTIONS AND PREAMORPHIZATION FOR DEEP SUBMICRON SILICON TECHNOLOGY." Journal of applied physics 73.8 (1993): 4048-4053. Link to Full Text for this item Link to SFX for this item
2. CHEN, WJ. "INTERFACIAL REACTIONS OF NICKEL THIN-FILMS ON BF2+-IMPLANTED (001)SI." Journal of applied physics 70.5 (1991): 2628-2633. Link to Full Text for this item Link to SFX for this item
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