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Title:
Nonplanar and noncontinuous buried layers of SiO2 in silicon formed by ion beam synthesis
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Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms [0168-583X] Hemment, P.L.F. yr:1989
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author:
Hemment, P.L.F.
Reeson, K J
Robinson, A K
Kilner, J A
Chater, R J
Marsh, C D
Christensen, K N
Davis, J R
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author:
Hemment, P.L.F.
Reeson, K J
Robinson, A K
Kilner, J A
Chater, R J
Marsh, C D
Christensen, K N
Davis, J R
last name
initials
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