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Title:
High energy P implants in silicon
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Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms [0168-583X] Raineri, V yr:1992
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Raineri, V
Cacciato, A
Benyaïch, F
Priolo, F
Rimini, E
Galvagno, G
Capizzi, S
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author:
Raineri, V
Cacciato, A
Benyaïch, F
Priolo, F
Rimini, E
Galvagno, G
Capizzi, S
last name
initials
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author:
Raineri, V
Cacciato, A
Benyaïch, F
Priolo, F
Rimini, E
Galvagno, G
Capizzi, S
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initials
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