Characterisation of implanted and evaporated layers by RBS analysis

doi:10.1016/0167-5087(82)90117-X

Nuclear Instruments and Methods in Physics Research

Volume 197, Issue 1, 1 June 1982, Pages 51-57

https://doi.org/10.1016/0167-5087(82)90117-X Get rights and content

Abstract

Proton and alpha Rutherford backscattering analysis and particle induced X-ray emission have been used to investigate the purity, thickness and stoichiometry of 15 commercially available X-ray fluorescence standards and a fluorine implanted carbon sample. Differences between the calibrated thicknesses so obtained and the stated values are presented and discussed.

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Part I. Depth profiling using nuclear reactions (new developments)Characterisation of implanted and evaporated layers by RBS analysis

Abstract

Nucl. Instr. and Meth.

Nucl. Instr. and Meth.

Nucl. Instr. and Meth.

Nucl. Instr. and Meth.

Nucl. Instr. and Meth.

Nucl. Instr. and Meth.

Part I. Depth profiling using nuclear reactions (new developments)
Characterisation of implanted and evaporated layers by RBS analysis