Skip to main content
SpringerLink
Log in

Investigation of surface topography, morphology and structure of amorphous carbon films by AFM and TEM

  • Poster Sessions
  • Structure Of Surfaces And Thin Films
  • Published:
Fresenius' Journal of Analytical Chemistry Aims and scope Submit manuscript

Abstract

Morphology and structure of amorphous carbon films deposited with a pulsed arc source (LASER-ARC) have been studied using microscopical methods (SEM, TEM and AFM), electron diffraction and spectroscopical investigation (EELS). The parameters of the arc source and the deposition conditions (substrate temperature) influence morphology and structure of deposited amorphous carbon films. Especially the incorporation and growth of particles, embedded in the film have been investigated. By particle analysis using an optical microscope a majority of particles that is smaller than 500 nm has been determined. The morphology has been also demonstrated similar by AFM and TEM images. Their number and size of particles is strongly influenced by the deposition temperature. The structure of amorphous film is characterized by the EELS-spectra, but the particle structure was not detectable.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Veerashamy VS, Amaratunga GAJ, Milne WI, Hewitt P, Fallon PJ, McKenzie DR, Davis CA (1993) Diamond Related Mat 2:782

    Google Scholar 

  2. Aksenov II, Vakula SI, Strel'nitskij VE (1991) Proc. 1st European Conf. on Diamond and Diamond-like Carbon Coatings, Crans-Montana, September 1990. Elsevier, Lausanne, p 98

    Google Scholar 

  3. Coll BF (1994) In: Hecht G, Richter F, Hahn J (eds) Thin film. DGM Informationsgesellschaft, Oberursel, p 3

  4. Scheibe H-J, Siemroth P (1990) IEEE Trans Plasma Sci 18:917

    Google Scholar 

  5. Scheibe H-J, Ristau D, Rahe M (1993) Diamond Related Mat 2:1424

    Google Scholar 

  6. Scheibe H-J, Drescher D, Alers P (1995) Raman characterization of amorphous carbon films. Fresenius J Anal Chem (this issue)

  7. Gilkes KWR, Gaskell PH, Yuan J (1994) Diamond Related Mat 3:369

    Google Scholar 

  8. McKenzie DR, Yin Y, Marks NA, Davis CA, Pailthorpe BA, Amaratunga GAJ, Veerashamy VS (1994) Diamond Related Mat 3:353

    Google Scholar 

  9. Robertson J (1994) Diamond Related Mat 3:361

    Google Scholar 

  10. Fraunheim T, Stephan U, Blaudeck P, Jungnickel G (1994) Diamond Related Mat 3:462

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Fraunhofer-Institut für Werkstoffphysik und Schichttechnologie, Helmholtzstrasse 20, D-01069, Dresden, Germany

    H.-J. Scheibe & D. Drescher

  2. Institut für Ionenstrahlphysik und Materialforschung, Forschungszentrum Rossendorf e. V., Postfach 510119, D-01314, Dresden, Germany

    A. Kolitsch

  3. Institut für Werkstoffwissenschaft, TU Dresden, D-01062, Dresden, Germany

    A. Mensch

Authors
  1. H.-J. Scheibe
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. D. Drescher
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. Kolitsch
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. Mensch
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Scheibe, HJ., Drescher, D., Kolitsch, A. et al. Investigation of surface topography, morphology and structure of amorphous carbon films by AFM and TEM. Fresenius J Anal Chem 353, 690–694 (1995). https://doi.org/10.1007/BF00321351

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00321351

Keywords

Search

Navigation