Skip to main content
SpringerLink
Log in

Radio-frequency glow discharge ion source for high resolution mass spectrometry

  • Poster Sessions
  • Development Of Apparatus
  • Published:
Fresenius' Journal of Analytical Chemistry Aims and scope Submit manuscript

Abstract

A radio-frequency powered glow discharge ion source has been developed for a double-focusing mass spectrometer. The sputtering and ionization of conducting, semiconducting and insulating materials have been realized using a 13.56 MHz generator to supply the discharge operating potential. The glow discharge ion source operates stably at argon pressures of 0.1–1 hPa and radio frequency powers of 10–50 W. The influence of discharge parameters and gas inlet system on sputtering rates and ion signal intensities for semi-insulating gallium arsenide wafers has been investigated.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Marcus RK (1993) Glow discharge spectroscopy. Plenum Press, New York, London

    Google Scholar 

  2. Kohler K, Coburn JW, Horne DE, Kay E, Keller JH (1985) J Appl Phys 57:59–66

    Google Scholar 

  3. Duckworth DC, Marcus RK (1989) Anal Chem 61: 1879–1886

    Google Scholar 

  4. Chapman BN (1980) Glow discharge process, chap 5. Wiley, New York

    Google Scholar 

  5. Van Straaten M, Vertes A, Gijbels R (1991) Spectrochim Acta 46B:283–290

    Google Scholar 

  6. Lasik C, Marcus RK (1993) Spectrochim Acta 48B:863–875

    Google Scholar 

  7. Duckworth DC, Marcus RK (1990) Appl Spectrosc 44:649–655

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Zentralabteilung für Chemische Analysen, Forschungszentrum Jülich, D-52425, Jülich, Germany

    F.-G. Melchers, J. S. Becker & H.-J. Dietze

  2. Institute of Inorganic Chemistry, 630090, Novosibirsk, Russia

    A. I. Saprykin

Authors
  1. A. I. Saprykin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. F.-G. Melchers
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. J. S. Becker
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. H.-J. Dietze
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Saprykin, A.I., Melchers, FG., Becker, J.S. et al. Radio-frequency glow discharge ion source for high resolution mass spectrometry. Fresenius J Anal Chem 353, 570–574 (1995). https://doi.org/10.1007/BF00321325

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00321325

Keywords

Search

Navigation