ExLibris header image
SFX Logo
Title: Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics
Source:

Journal of Applied Physics [0021-8979] yr:2015


Collapse list of basic services Basic
Holding information
Holdings in library search engine ALBERT GO
Document delivery
Request document via Library/Bibliothek GO

Expand list of advanced services Advanced
A service provided by the Library of the Wissenschaftspark Albert Einstein, Potsdam, Germany.
© 2005 SFX by Ex Libris Inc.