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Fabrication of Microstripline Wiring for Large Format Transition Edge Sensor ArraysWe have developed a process to integrate microstripline wiring with transition edge sensors (TES). The process includes additional layers for metal-etch stop and dielectric adhesion to enable recovery of parameters achieved in non-microstrip pixel designs. We report on device parameters in close-packed TES arrays achieved with the microstrip process including R(sub n), G, and T(sub c) uniformity. Further, we investigate limits of this method of producing high-density, microstrip wiring including critical current to determine the ultimate scalability of TES arrays with two layers of wiring.
Document ID
20120016493
Acquisition Source
Goddard Space Flight Center
Document Type
Reprint (Version printed in journal)
External Source(s)
doi:10.1007/s10909-012-0552-4
Authors
Chervenak, James A. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Adams, J. M. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Bailey, C. N. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Bandler, S. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Brekosky, R. P. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Eckart, M. E. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Erwin, A. E. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Finkbeiner, F. M. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Kelley, R. L. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Kilbourne, C. A. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Porter, F. S. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Sadlier, J. E. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Smith, S. J. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Date Acquired
August 26, 2013
Publication Date
February 2, 2012
Publication Information
Publication: Journal of Low Temperature Physics
Volume: 167
Issue: 4-Mar
Subject Category
Electronics And Electrical Engineering
Report/Patent Number
GSFC.JA.7324.2012
GSFC-E-DAA-TN9557
Distribution Limits
Public
Copyright
Public Use Permitted.

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