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Fabrication and Performance of Large Format Transition Edge Sensor Microcalorimeter ArraysWe have produced a variety of superconducting transition edge sensor array designs for microcalorimetric detection of x-rays. Designs include kilopixel scale arrays of relatively small sensors (~75 micron pitch) atop a thick metal heatsinking layer as well as arrays of membrane-isolated devices on 250 micron pitch and smaller arrays of devices up to 600 micron pitch. We discuss the fabrication techniques used for each type of array focusing on unique aspects where processes vary to achieve the particular designs and required device parameters. For example, we evaluate various material combinations in the production of the thick metal heatsinking, including superconducting and normal metal adhesion layers. We also evaluate the impact of added heatsinking on the membrane isolated devices as it relates to basic device parameters. Arrays can be characterized with a time division SQUID multiplexer such that greater than 10 devices from an array can be measured in the same cooldown. Device parameters can be measured simultaneously so that environmental events such as thermal drifts or changes in magnetic fields can be controlled. For some designs, we will evaluate the uniformity of parameters impacting the intrinsic performance of the microcalorimeters under bias in these arrays and assess the level of thermal crosstalk.
Document ID
20120013277
Acquisition Source
Goddard Space Flight Center
Document Type
Conference Paper
Authors
Chervenak, James A. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Adams, James S. (NASA Dryden Flight Research Center Edwards, CA, United States)
Bandler, Simon R. (Maryland Univ. College Park, MD, United States)
Busch, Sara E. (Oak Ridge Associated Universities, Inc. TN, United States)
Eckart, M. E. (Maryland Univ. Baltimore County MD, United States)
Ewin, A. E.
Finkbeiner, F. M.
Kilbourne, C. A. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Kelley, R. L. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Porst, Jan-Patrick (Maryland Univ. College Park, MD, United States)
Porter, Frederick S. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Ray, C.
Sadleir, John E. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Smith, S. J.
Wassell, Edward J. (Muniz Engineering, Inc. United States)
Date Acquired
August 26, 2013
Publication Date
January 1, 2012
Subject Category
Electronics And Electrical Engineering
Report/Patent Number
GSFC.ABS.01103.2012
Meeting Information
Meeting: Applied Superconductivity Conference
Location: Portland, OR
Country: United States
Start Date: October 8, 2012
End Date: October 12, 2012
Distribution Limits
Public
Copyright
Public Use Permitted.

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