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Multi-channel electronically scanned cryogenic pressure sensorA miniature, multi-channel, electronically scanned pressure measuring device uses electrostatically bonded silicon dies in a multielement array. These dies are bonded at specific sites on a glass, prepatterned substrate. Thermal data is multiplexed and recorded on each individual pressure measuring diaphragm. The device functions in a cryogenic environment without the need of heaters to keep the sensor at constant temperatures.
Document ID
19950020718
Acquisition Source
Legacy CDMS
Document Type
Other - Patent Application
Authors
Chapman, John J. (Chapman, John J., Wareneck VA., United States)
Hopson, Purnell, Jr. (Hopson, Purnell, Jr., Seaford VA., United States)
Kruse, Nancy M. H. (Kruse, Nancy M. H., Hayes VA., United States)
Date Acquired
August 16, 2013
Publication Date
April 4, 1995
Subject Category
Instrumentation And Photography
Report/Patent Number
NAS 1.71:LAR-15062-1
Accession Number
95N27138
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
NASA-CASE-LAR-15062-1
Patent Application
US-PATENT-APPL-SN-416596

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