NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Collections About News Help Login
Back to Results
Controlled decomposition and oxidation: A treatment method for gaseous process effluentsThe safe disposal of effluent gases produced by the electronics industry deserves special attention. Due to the hazardous nature of many of the materials used, it is essential to control and treat the reactants and reactant by-products as they are exhausted from the process tool and prior to their release into the manufacturing facility's exhaust system and the atmosphere. Controlled decomposition and oxidation (CDO) is one method of treating effluent gases from thin film deposition processes. CDO equipment applications, field experience, and results of the use of CDO equipment and technological advances gained from the field experiences are discussed.
Document ID
19910006631
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Mckinley, Roger J. B., Sr. (Innovative Engineering, Inc. Santa Clara, CA, United States)
Date Acquired
September 6, 2013
Publication Date
July 1, 1990
Publication Information
Publication: NASA, Marshall Space Flight Center, Space Station Freedom Toxic and Reactive Materials Handling
Subject Category
Engineering (General)
Accession Number
91N15944
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

Related Records

There are no records associated with this record.
No Preview Available