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A fluidized-bed reactor for silane pyrolysisThe silane decomposition in a fluidized bed reactor was studied. The process feasibility and operating windows were determined. Long duration tests were conducted and silicon purity was demonstrated. A high purity linear was installed in the fluid bed reactor; the FBR product was melted and single crystallized. Product purity improvements are noted.
Document ID
19850024100
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Iya, S. (Union Carbide Corp. Tonawanda, NY, United States)
Date Acquired
August 12, 2013
Publication Date
October 1, 1984
Publication Information
Publication: JPL Proc. of the 24th Project Integration Meeting
Subject Category
Energy Production And Conversion
Accession Number
85N32413
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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IDRelationTitle19850024081Collected WorksProceedings of the 24th Project Integration Meeting
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