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Investigation of refractory dielectric for integrated circuits Fourth quarterly report, May 1969Refractory dielectric for integrated circuits
Document ID
19700005615
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Doo, V. Y. (International Business Machines Corp. Hopewell Junction, NY, United States)
Li, P. C. (International Business Machines Corp. Hopewell Junction, NY, United States)
Tsang, P. J. (International Business Machines Corp. Hopewell Junction, NY, United States)
Date Acquired
August 5, 2013
Publication Date
May 1, 1969
Subject Category
Electronic Equipment
Report/Patent Number
NASA-CR-86292
Accession Number
70N14919
Funding Number(s)
CONTRACT_GRANT: NAS12-667
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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