NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Collections About News Help Login
Back to Results
Investigation of refractory dielectric for integrated circuits Second quarterly report, Dec. 1968Process development for chemical deposition of aluminum oxide films as refractory dielectrics for integrated circuits
Document ID
19700004985
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Doo, V. Y. (International Business Machines Corp. Hopewell Junction, NY, United States)
Li, P. C. (International Business Machines Corp. Hopewell Junction, NY, United States)
Tsang, P. J. (International Business Machines Corp. Hopewell Junction, NY, United States)
Date Acquired
August 5, 2013
Publication Date
December 1, 1968
Subject Category
Electronic Equipment
Report/Patent Number
NASA-CR-86290
Accession Number
70N14289
Funding Number(s)
CONTRACT_GRANT: NAS12-667
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

Related Records

There are no records associated with this record.
No Preview Available