Humidity-sensitive oscillator fabricated in double poly CMOS technology
Reference (6)
- et al.
A capacitive humidity sensor based on CMOS technology with absorbing film
Sensors and Actuators
(1988) Smart sensors
Sensors and Actuators
(1987)- et al.
Humidity sensors: principles and applications
Sensors and Actuators
(1987)
There are more references available in the full text version of this article.
Cited by (9)
Ceramic sensors for humidity detection: the state-of-the-art and future developments
1995, Sensors and Actuators: B. ChemicalLow-cost, high-precision measurement system for capacitive sensors
1998, Measurement Science and TechnologyNovel humidity sensor compatible with CMOS technology
2004, Pan Tao Ti Hsueh Pao/Chinese Journal of SemiconductorsWeather Station on a chip
2003, Proceedings of IEEE SensorsCapacitive humidity sensor in CMOS technology
2001, Proceedings of SPIE - The International Society for Optical EngineeringX-ray photoelectron spectroscopy investigation of MgAl204 thin films for humidity sensors
1994, Journal of Materials Research
Copyright © 1990 Published by Elsevier B.V.