Bias-dependent etching of silicon in aqueous ammonia☆
References (7)
- et al.
Vertically structured silicon membranes by electrochemical etching
Sensors and Actuators
(1990) - et al.
NH4OH-based etchants for silicon micromachining
Sensors and Actuators
(1990) - et al.
Novel electrochemical micro-machining and its application for semiconductor accelerometer
Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan
(1987)
There are more references available in the full text version of this article.
Cited by (0)
- ☆
Paper presented at the 6th International Conference on Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, June 24–28, 1991.
Copyright © 1992 Published by Elsevier B.V.