A new microbeam formation system

Abstract

A new concept of a compact microbeam formation system is proposed and being constructed by slightly modifying an existing 400 keV ion accelerator at ULVAC. In this system, an object slit is placed on the high voltage terminal and the acceleration tube incorporated with a quadrupole doublet forms the reduced image on the sample position. The beam acceleration between the object and image results in the image size reduction which is profitably used in this design. The effects of the lens action at the entrance of the acceleration tube are discussed based on the beam optics calculation by using the standard matrix formalism.