Damage induced during channeling measurements with a nuclear microprobe

https://doi.org/10.1016/0168-583X(91)95518-IGet rights and content

Abstract

The damage in samples induced by probe ions during microbeam RBS/channeling was studied. Degradation of crystallinity of Si due to 400 keV He+ irradiation was observed at a dose higher than 2 × 1017/cm2 by measuring aligned RBS spectra. Swelling of the surface at the irradiated area was also observed at a dose of 1 × 1018/cm2.

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