Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volumes 37–38, 2 February 1989, Pages 951-954
Section VIII. Special topicVery high energy implants of boron into silicon
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There are more references available in the full text version of this article.
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Measurements and applications of high energy boron implants in silicon
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1994, Russian Physics JournalExperimental analysis of high energy boron implantation in silicon
1994, Radiation Effects and Defects in SolidsIsolation properties and experimental ranges of high energy ions in GaAs and InP
1992, Journal of Applied PhysicsHigh-energy (56 MeV) oxygen implantation in Si, GaAs, and InP
1990, Applied Physics Letters
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