Surface profiling of insulating layers using desorption induced by monatomic or cluster ions of beam diameter in the 5–10 μm range☆
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Cited by (9)
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First presented at the Tenth International Conference on the Application of Accelerators in Research and Industry, Denton, Texas, Nov. 7–9, 1988.
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Permanent address: Centre for Energy Research and Development, OBAFEMI AWOLOWO University, Ile Ife, Nigeria.
Copyright © 1989 Published by Elsevier B.V.