Cross sections for sputtering of p(2 × 2) oxygen on Ni(111) by 5–200 eV Ne+

doi:10.1016/0168-583X(87)90102-9

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Volume 28, Issue 2, September 1987, Pages 185-190

https://doi.org/10.1016/0168-583X(87)90102-9 Get rights and content

Abstract

Absolute Ne⁺ ion induced sputtering cross sections for the p(2 × 2) chemisorbed oxide phase on Ni(111) by bombardment with 5–200 eV Ne⁺ at normal incidence to the surface have been measured. Decreases in surface oxygen as a function of ion dose were monitored by two techniques (i) Auger electron spectroscopy (AES) and (ii) time-of-flight measurements of the directly recoiled (TOF-DR) oxygen atoms using a grazing incidence pulsed 3 keV Ar⁺ beam. Our results indicate oxygen removal down to 20 eV Ne⁺ energy. The sputtering cross section increases to σ ∼ 7A² or a sputtering yield of S ∼ 0.43 above 150 eV. Application of binary collision sputtering models indicates that for E ≲120 eV, the dominant oxygen removal mechanism is knock-off by projectile Ne⁺, whereas at higher energies oxygen is mainly removed by sputtered Ni atoms moving outward through the surface region.

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Comparing hyperthermal molecular and atomic ion sputtering of adsorbates: Xe+ versus SF<inf>5</inf>+ on NH<inf>3</inf>/CO/Ni(111)
1998, International Journal of Mass Spectrometry and Ion Processes
Polyatomic ion-induced desorption of adsorbates is an important effect in secondary ion mass spectrometry, surface-induced dissociation and both ion beam and plasma processing of materials. We compared the adsorbate desorption cross-sections for a model ion-adsorbate system, NH₃/CO/Ni(111) exposed to the isobaric atomic and polyatomic ions, Xe⁺ and SF₅⁺, with kinetic energies of 10–1000 eV. The depletion of the adsorbate layer and the formation of new surface chemical species were monitored by X-ray photoelectron spectroscopy. Two to three times higher desorption cross-sections for both NH₃ and CO were observed for SF₅⁺ ion bombardment compared with Xe⁺ at the same incident energy. TRIDYN Monte Carlo simulations generally gave good agreement with the experimental results. TRIDYN implicated the larger reflected ion contributions for S and F compared with Xe as the source of the enhanced desorption yields by the polyatomic ion. Substrate damage was also found to be lower for SF₅⁺ than Xe⁺ due to the former's lower energy per atom and lighter constituent atom masses.
Hyperthermal (10-500 eV) collisions of noble gases with Ni(100) surface Comparison between light and heavy atom collisions
1995, Nuclear Inst. and Methods in Physics Research, B
Collisional events between 10–500 eV atomic beams (He, Ne, Ar, Kr, and Xe) and a Ni(100) surface are investigated by the classical trajectory method. The calculation employs a molecular dynamics approach combined with a Langevin method for treating energy dissipation to infinite solid. We find that low energy collisions of heavy atoms (Xe and Kr) are characterized by extensive many-body interactions with top layer surface atoms. On the other hand, light atom (Ne and He) collisions can be approximated as a sequence of binary collisions even at these energies. Such a difference in the collisional nature gives rise to the following consequences. Low energy heavy atoms transfer energy mostly to the surface atoms during 45° angle collision. They scatter from the surface with a narrow angular distribution centered in a supraspecular direction. The ratio of the scattered to incident particle energy rapidly decreases with increasing beam energy of heavy atoms. The sputtering yield for Ni atoms by heavy atom bombardment increases quite linearly with beam energy, which is attributed to a linear proportionality between the beam energy and the energy transfered to a surface. Near the threshold energy sputtering can occur more efficiently by light atom bombardment. The energy transfer ratio to solid continuously increases with beam energy for light atoms. For heavy projectiles, on the other hand, this ratio reaches a maximum at the energy of ca, 100 eV, above which it stays nearly constant but slightly decreases.
Secondary ion emission from clean and K-covered Ni surfaces near threshold impact energies
1994, Surface Science
Clean and K-covered Ni surfaces are bombarded with low energy (10–500 eV) beams of He⁺, Ne⁺, Ar²⁺, and Kr⁺ ions, and the emitted ion yield is measured as a function of beam energy. The apparent threshold energies for K⁺ and Ni⁺ emission are proportional to the ionic binding energies of K⁺ and Ni⁺ to the Ni surface. From comparison of the ion and neutral yield curves, it is suggested that these ions are emitted via momentum transfer collisions similar to neutral sputtering.
Low-energy ion impact desorption cross sections of carbon monoxide from Ni(111)
1991, Surface Science
We report on the determination of cross sections for desorption (σ_D) of CO/Ni(111) induced by rare-gas ion (He, Ne, Ar and Kr) bombardment at very low impact energy (10–500 eV). When bombarding the initially fully covered surface, mainly neutral CO was desorbed as was measured by the means of a quadrupole mass spectrometer. The desorption cross section was determined from the exponential decay of the signal of desorbed CO. The experiment was simulated with the dynamic Monte Carlo code TRIDYN [W. Möller, W. Eckstein and J.P. Biersack, Comput. Phys. Commun. 51 (1988) 355], and a very good agreement with σ_D obtained in the experiment was found. By comparing the calculated values of sputtering yields with σ_D, the role of recoil implantation and dissociation is discussed.
Ion scattering and surface recoiling from a Si surface by low energy Ne+ bombardment
1990, Vacuum
Surface recoiling and ion scattering from a water and/or oxygen covered Si(001) surface were studied by a Time-of-Flight (TOF) technique for low energy Ne⁺ beam bombardment. The TOF spectra were measured for the sample at various elevated temperatures, from which it is suggested that the technique is useful to study solid surfaces at high temperatures. It was found that the positively charged fraction of recoiled oxygen atoms is dependent on the amount of surface oxygen atoms and increases with it.
Inelastic processes in low-energy ion-surface collisions
1989, Surface Science Reports
Studies involving ion-solid interactions in the range of a few eV to a few keV that are intermediate between thermal gas-surface interactions and high energy bulk implantation are collectively examined in this review. The interactive process is traced in a phenomenological manner by providing a simple treatment of the different physical and chemical phenomena involved. The kinematics of noble gas ion as well as atomic and molecular reactive ion interactions with surfaces are treated in terms of classical dynamics and experiments are described that probe the nature of ion-solid interaction potentials by examining the scattering of ions from surfaces and the charge exchange processes operative during scattering. Molecular ion scattering is investigated and the behavior interpreted in terms of partial dissociation that results in both atomic and molecular scattering. A neutralization model is described that considers the interaction domain to be divided into three steps: the incoming trajectory, the close encounter, and the outgoing trajectory. A spectrum of possible results from the interaction process is described; these include reaction and chemical alteration of the target surface, desorption of adsorbate atoms by hyperthermal physical/chemical interaction, and accumulation of a high surface concentration of the projectile species, viz. film deposition. These studies investigate the science basic to a number of technological phenomena and represent an elegant approach to the simulation of a number of these phenomena in the controlled environment of ultra-high vacuum. Qualitative and quantitative arguments are made for a number of the experimental results and cross-examination of data from different laboratories is made in terms of simple kinetic and thermodynamic concepts to illustrate fundamental similarities in the various studies.

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^☆: We thank our colleagues D.A. Baldwin, H.K. Hu, M.H. Mintz, J.A. Schultz, N. Shamir, and S. Tachi for many helpful discussions and contributions to these experiments. This material is based upon work supported by the National Science Foundation under Grant No. DMR-8610597.

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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Abstract

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Cited by (11)

Comparing hyperthermal molecular and atomic ion sputtering of adsorbates: Xe<sup>+</sup> versus SF<inf>5</inf><sup>+</sup> on NH<inf>3</inf>/CO/Ni(111)

Hyperthermal (10-500 eV) collisions of noble gases with Ni(100) surface Comparison between light and heavy atom collisions

Secondary ion emission from clean and K-covered Ni surfaces near threshold impact energies

Low-energy ion impact desorption cross sections of carbon monoxide from Ni(111)

Ion scattering and surface recoiling from a Si surface by low energy Ne<sup>+</sup> bombardment

Inelastic processes in low-energy ion-surface collisions

Cross sections for sputtering of p(2 × 2) oxygen on Ni(111) by 5–200 eV Ne+☆

Abstract

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Cross sections for sputtering of p(2 × 2) oxygen on Ni(111) by 5–200 eV Ne⁺☆