The elastic scattering factor in Auger electron spectroscopy

doi:10.1016/0039-6028(83)90184-X

Surface Science

Volume 129, Issues 2–3, 1 July 1983, Pages 336-344

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Abstract

We have calculated the contribution of elastic scattering of primary electrons to the Auger yield for Al, Si and Cu. We found an important contribution of the forward scattered electrons. We have also measured the primary energy dependence of the Auger yield for pure Al, Si and Cu. We found differences among calculations and measurements as great as 40%, which are attributed to uncertainties in escape depth and Auger transition rates rather than to the scattering effect.

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Information depth in Auger electron spectroscopy
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The depth from where the information comes in electron based spectroscopies is still a matter of controversy. In spite of having different physical meanings, inelastic mean free path, attenuation length, escape and information depths are parameters often taken as synonymous. In this work we analyze from the point of view of the Monte Carlo simulation the use of these parameters in Auger electron spectroscopy. We present results about the angular dependence of the electron yield, the in-depth contribution of the different layers to the total yield, and the electron energy and target mass dependence of the information depth. We found that the elastic scattering has two important effects on the electron transport: (i) the normal effect: the increase of the electron path inside the solid decreasing both the electron yield and the information depth, and (ii) the surface effect: the elastic scattering and the break of the isotropy of the medium due to the presence of a surface lowers the information depth, through the mechanism of increasing the electron yield coming from the near surface layers.
The backscattering factor in appearance potential spectroscopy
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Semi-empirical elemental sensitivities for quantitative auger electron spectroscopic analysis
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^∗: Miembro de la Carrera del Investigador del Consejo Nacional de Investigaciones Cientificas y Técnicas (CONICET), Rep. Argentina.

^∗∗: Becario del CONICET.

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Surface Science

The elastic scattering factor in Auger electron spectroscopy

Abstract

Surface Sci.

Surface Sci.

Surface Sci.

Surface Sci.

Surface Sci.

Surface Sci.

Surface Sci.

Surface Sci.

Surface Sci.

J. Electron Spectrosc. Related Phenomena

Surface Sci.

Limits to Auger-electron core-loss electron coincidence spectroscopy

Information depth in Auger electron spectroscopy

The backscattering factor in appearance potential spectroscopy

Ion mixing and backscattering effect in AES depth profiling

The elastic scattering effect on transmitted and reflected Al thin film Auger yields

Semi-empirical elemental sensitivities for quantitative auger electron spectroscopic analysis