Smoothing of interfaces in ultrathin Mo/Si multilayers by ion bombardment
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Nanometer interface and materials control for multilayer EUV-optical applications
2011, Progress in Surface ScienceCitation Excerpt :Significant smoothing of surfaces leading to sharper interfaces was first shown by Spiller on a RhRu/C multilayer [70] and by Puik on W/C multilayers [71]. Shortly after these first publications, successful application of ion beam smoothing of Mo/Si multilayers was reported by Kloidt [72] for short period multilayers and by Louis et al. [51] for coatings in the EUV range. Initially, most smoothing experiments have been carried out using Ar+ ions.
Modification by Ar and Kr ion bombardment of Mo/Si X-ray multilayers
1994, Applied Surface ScienceLarge area smoothing of surfaces by ion bombardment: Fundamentals and applications
2009, Journal of Physics Condensed MatterExciton confinement in organic multiple quantum well structures
1998, Journal of Physics D: Applied Physics
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