Laser-induced modifications in a-C:H thin films
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Kinetic modeling of laser annealing processes in a-C:H films
2011, VacuumCitation Excerpt :The highest temperatures are just below the surface, and there is a continuous decrease in temperature when going deeper in the film. Pulsed nanosecond and femtosecond laser irradiation in the visible light and UV domain was shown to induce the loss of hydrogen from the film, graphitization, and ablation [11–14,17–22]. The growth of Si and SiC crystallites was also reported [16].
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