The usefulness of a 400 kV high-resolution analytical electron microscope

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Abstract

In order to show the usefulness of a 400 kV high-resolution analytical electron microscope (JEM-4000EX), the accelerating voltage dependence of the peak-to-background ratio in both energy-dispersive X-ray spectroscopy (EDXS) and electron energy-loss spectroscopy (EELS) is studied. It is shown that the peak-to-background ratios increase continously with increase of the accelerating voltage from 100 to 400 kV. It is also shown that both crystal structure and chemical composition of 15R sialon polytype (SiAl4O2N4) may be determined on the basis of structure images and quantitative analysis of the corresponding EDXS and EELS spectra, demonstrating the capability of the combined techniques of high-resolution imaging and microanalysis.

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