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ATR-FTIR experiments with chlorosilanes

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Abstract

OH groups on the surface of semiconductors (SC) such as Si, Ge, TiO2, SnO2 react with Cl-Si groups to give stable SC-O-Si bonds. ATR-FTIR is applied to study the infrared spectra of adsorbed H8Si8O12 on ZnSe and Cl8Si8O12 which has reacted with the surface-OH group of Ge. A comparison is made with the spectra of the free molecules.

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Bürgy, H., Calzaferri, G. & Kamber, I. ATR-FTIR experiments with chlorosilanes. Mikrochim Acta 94, 401–403 (1988). https://doi.org/10.1007/BF01205916

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  • DOI: https://doi.org/10.1007/BF01205916

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