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Received: 7 July 1999/Accepted: 29 September 1999
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Inoue, M., Fukuda, D., Takahashi, H. et al. Development of new position sensitive electron multiplication device fabricated by LIGA process. Microsystem Technologies 6, 90–93 (2000). https://doi.org/10.1007/s005420050004
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DOI: https://doi.org/10.1007/s005420050004