Skip to main content
SpringerLink
Log in

Three-dimensional surface measurement using the confocal scanning microscope

  • Contributed Papers
  • Published:
Applied Physics B Aims and scope Submit manuscript

Abstract

The use of the depth discriminination property of the confocal scanning microscope for surface profiling has been adapted to provide a method of high-resolution three-dimensional surface profilometry. Measurements on a semiconductor specimen demonstrate the technique; depth variations of the order of 0.1 μm are clearly resolved.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. T. Wilson: Appl. Phys.22, 119 (1980)

    Google Scholar 

  2. C.J.R. Sheppard, T. Wilson: Opt. Lett.3, 115 (1978)

    Google Scholar 

  3. D.K. Hamilton, T. Wilson, C.J.R. Sheppard: Opt. Lett.6, 625 (1981)

    Google Scholar 

  4. D.K. Hamilton, T. Wilson: To be published

Download references

Author information

Authors and Affiliations

  1. Department of Engineering Science, University of Oxford, Parks Road, OX1 3PJ, Oxford, UK

    D. K. Hamilton & T. Wilson

Authors
  1. D. K. Hamilton
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. T. Wilson
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Hamilton, D.K., Wilson, T. Three-dimensional surface measurement using the confocal scanning microscope. Appl. Phys. B 27, 211–213 (1982). https://doi.org/10.1007/BF00697444

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00697444

PACS

Search

Navigation