Abstract
Current-voltage characteristics of a gas field ion source (GFIS) have been measured for hydrogen and all rare gases. The parameter set included tip temperature, tip radius and gas temperature and pressure. This investigation has been made to get a complete overview of the field ion currents (FIC) and to estimate the maximum currents in a GFIS, which have been found to a few 100 nA. This estimate allows also a feasibility study of a GFIS, modified by a supertip, a small protuberance on the emitter surface.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
J. Muray: InIon Beam Technology in Wafer Processing, ed. by P. Burggraaf, Semiconductor International (1984) p. 130
P.R. Schwoebel, G.R. Hanson: J. Vac. Sci. Technol. B5, 195 (1987)
P.R. Schwoebel: Surf. Sci.181, 154 (1987)
P.R. Schwoebel, G.R. Hanson: J. Appl. Phys.56, 2101 (1985)
T.T. Tsong, E. W. Müller: J. Chem. Phys.41, 3279 (1964)
G.R. Hanson, B.M. Siegel: J. Vac. Sci. Technol.19, 1176 (1981)
H. Ahmed: J. Microsc.139, 167 (1985)
E.W. Müller, T.T. Tsong:Field Ion Microscopy (Am. Elsevier, New York 1969)
R. Gomer:Field Emission and Fied Ionization (Harvard Univ. Press, Cambridge, MA 1961)
H.A.M. van Eekelen: Surf. Sci.21, 21 (1970)
H. Iwasaki, S. Nakamura: Surf. Sci.52, 588 (1975)
H. Iwasaki, S. Nakamura: Surf. Sci.52, 597 (1975)
Y.C. Chen, D.N. Seidman: Surf. Sci.27, 231 (1971)
R. Haydock, D.R. Kingham: Surf. Sci.103, 239 (1981)
R.G. Forbes: J. Phys. D18, 973 (1985)
M.J. Southon: Thesis, University of Cambridge (1963)
E.W. Müller, K. Bahadur: Phys. Rev.102, 624 (1956)
M.J. Southon, D.G. Brandon: Philos. Mag.8, 579 (1963)
U. Feldman, R. Gomer: J. Appl. Phys.37, 2380 (1966)
T.T. Tsong, E.W. Müller: J. Appl. Phys.37, 3065 (1966)
J.C. Wiesner, T.E. Everhardt: J. Appl. Phys.44, 2140 (1973)
J.H. Orloff, L.W. Swanson: J. Vac. Sci. Technol.12, 1209 (1975)
A.A. Holscher: Thesis, Universität Leiden (1967)