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Surface analysis with low energy ion scattering

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Abstract

Principles and applications of low energy ion scattering for surface analysis are presented. Basic features are the binary collision concept, the scattering cross-sections and the ion neutralization process. The potential and the limitations of the method are outlined. Some pertinent experimental aspects are considered. In a number of examples the performance of the technique is demonstrated for qualitative and quantitative composition analysis and for studies of surface structures. Finally a few comparisons are made with other techniques, such as AES, LEED, or SIMS.

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Authors and Affiliations

  1. Max-Planck-Institut für Plasmaphysik, EURATOM-Association, D-8046, Garching/München, Fed. Rep. Germany

    E. Taglauer & W. Heiland

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  1. E. Taglauer
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  2. W. Heiland
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Taglauer, E., Heiland, W. Surface analysis with low energy ion scattering. Appl. Phys. 9, 261–275 (1976). https://doi.org/10.1007/BF00900452

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