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Received: 4 January 1999 / Accepted: 5 January 1999
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Lenzner, M., Krüger, J., Kautek, W. et al. Precision laser ablation of dielectrics in the 10-fs regime . Appl Phys A 68, 369–371 (1999). https://doi.org/10.1007/s003390050906
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DOI: https://doi.org/10.1007/s003390050906