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matrix by ion-beam mixing of SiO2/Ag multilayers is studied via Rutherford backscattering spectrometry, optical absorption, and transmission electron microscopy experiments. In a first step, irradiation with MeV heavy ions transforms the continuous Ag layers into a string of micrometer-sized Ag inclusions. This mechanism can be attributed to lateral segregation of metallic atoms induced by irradiation. In a second step, the Ag inclusions are broken up by incoming ions and Ag nanoclusters are formed by agglomeration of mobile Ag atoms. The latter mechanism is likely due to a combination of ballistic mixing and radiation-induced segregation or radiation-enhanced diffusion processes. The size of the metallic nanoclusters formed depends also on the irradiation temperature.
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Received: 27 October 1997/Accepted: 3 February 1998
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Thomé, L., Rizza, G., Garrido, F. et al. Formation of metallic nanophases in silica by ion beam mixing. Part II: cluster formation . Appl Phys A 67, 241–247 (1998). https://doi.org/10.1007/s003390050765
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DOI: https://doi.org/10.1007/s003390050765