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Sputtering of solid argon by keV electrons

  • Surfaces, Interfaces, and Layer Structures
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Abstract

Sputtering of the solid rare gas Ar by 0.8-3.0 keV electrons was studied experimentally and theoretically. The argon films were deposited on a quartz-crystal microbalance kept at liquid-helium temperature. The yield was determined from the mass loss during irradiation. The absolute yield shows a significant dependence on film thickness in accordance with earlier measurements on electronic sputtering of solid argon. The yield shows a maximum of about 3.0±0.4 Ar/elec. at 1.5 keV. The thickness dependence reflects the mobility of electronic excitations created by the primary electrons. The data analysis is based on a theoretical treatment for the diffusive motion of these excitations. From the thickness as well as the energy dependence of the yield we may derive a characteristic diffusion length for the excitations of 200–300 Å.PACS: 61.80 Fe, 66.30 Lw, 79.20 Kz

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References

  1. P. Børgesen, J. Schou, H. Sørensen, C. Claussen: Appl. Phys. A.29, 57–61 (1982)

    Google Scholar 

  2. O. Ellegaard, J. Schou, H. Sorensen: Nucl. Instr. Meth. B13, 567–571 (1986)

    Google Scholar 

  3. J. Schou, P. Børgesen, O. Ellegaard, H. Sørensen, C. Claussen: Phys. Rev. B34, 93–106 (1986)

    Google Scholar 

  4. F. Besenbacher, J. Bøttiger, O. Graversen, J.L. Hansen, H. Sørensen, Nucl. Instr. Meth.191, 221–234 (1981)

    Google Scholar 

  5. C.T. Reimann, R.E. Johnson, W.L. Brown: Phys. Rev. Lett,53, 600–603 (1984)

    Google Scholar 

  6. W.L. Brown, C.T. Reimann, R.E. Johnson: Nucl. Instr. Meth. B19–20, 9–15 (1987) C.T. Reimann, W.L. Brown, R.E. Johnson: Phys. Rev. B.37, 1455–1473 (1988)

    Google Scholar 

  7. J. Schou, O. Ellegaard, H. Sørensen, R. Pedrys: Nucl. Instr. Meth. B (in press)

  8. D.J. O'Shaughnessey, J.W. Boring, J.A. Phipps, R.E. Johnson, W.L. Brown: Nucl. Instr. Meth. B13, 304–308 (1986)

    Google Scholar 

  9. J.W. Boring, D.J. O'Shaughnessy, J.A. Phipps: Nucl. Instr. Meth. B18, 613–617 (1987)

    Google Scholar 

  10. J. Schou, R. Pedrys, O. Ellegaard, H. Sørensen, Nucl. Instr. Meth. B18, 609–612 (1987)

    Google Scholar 

  11. R.W. Ollerhead, J. Bøttiger, J.A. Davies, J. L'Ecuyer, H.K. Haugen, N. Matsunami: Radiat. Eff.49, 203–212 (1980)

    Google Scholar 

  12. D.V. Stevanovic, D.A. Thompson, J.A. Davies: Nucl. Instr. Meth. B1, 315–320 (1984)

    Google Scholar 

  13. J. Schou: Nucl. Instr. Meth. B27, 188–200 (1987)

    Google Scholar 

  14. W.L. Brown, R.E. Johnson: Nucl. Instr. Meth. B13, 295–303 (1986)

    Google Scholar 

  15. D.E. David, T.F. Magnera, R. Tian, D. Stulik, J. Michl: Nucl. Instr. Meth. B14, 378–391 (1986)

    Google Scholar 

  16. R. Pedrys, D.J. Oostra, A.E. de Vries: InDesorption Induced by Electronic Transitions, DIET 2, ed. by W. Brenig, D. Menzel (Springer, Berlin, Heidelberg 1985) pp. 190–198

    Google Scholar 

  17. R. Pedrys, D.J. Oostra, Å. Haring, A.E. de Vries, J. Schou: Nucl. Instr. Meth. B (in press)

  18. R.L. Fleischer, P.B. Price, R.M. Walker: J. Appl. Phys.36, 3645–3652 (1965)

    Google Scholar 

  19. D. Menzel, R. Gomer: J. Chem. Phys.41, 3311–3328 (1964)

    Google Scholar 

  20. Rare Gas Solids, Vols. 1 and 2, ed. by M.L. Klein, J.A. Venables (Academic, London 1977)

    Google Scholar 

  21. N. Schwentner, E.E. Koch, J. Jortner:Electronic Excitations in Condensed Rare Gases, Springer Tracts Mod. Phys.107 (Springer, Berlin, Heidelberg 1985)

    Google Scholar 

  22. G. Zimmerer:In Excited State Spectroscopy in Solids, ed. by M. Manfredi (XCVI Corso, Soc. Italiana di Fisica, Bologna 1987) pp. 37–110

    Google Scholar 

  23. R.E. Johnson, W.L. Brown: Nucl. Instr. Meth.198, 103–118 (1982)

    Google Scholar 

  24. R.E. Johnson, M. Inokuti: Nucl. Instr. Meth.206, 289–297 (1983)

    Google Scholar 

  25. F. Coletti, J.M. Debever: Solid State Commun.47, 47–50 (1983)

    Google Scholar 

  26. F. Coletti, J.M. Debever, G. Zimmerer: J. de Phys. Lett.45, L–467–473 (1984)

    Google Scholar 

  27. W.L. Brown, C.T. Reimann, R.E. Johnson:Desorption Induced by Electronic Transitions DIET 2, ed. by W. Brenig, D. Menzel (Springer, Berlin, Heidelberg 1985) pp. 199–206

    Google Scholar 

  28. F. Coletti, J.M. Debever, G. Zimmerer: J. Chem. Phys.83, 49–57 (1985)

    Google Scholar 

  29. O. Ellegaard: Ph. D. Thesis, Risø-M-2617, Risø National Laboratory, Roskilde, Denmark, pp. 1–175 (1986)

  30. J. Schou, H. Sørensen, P. Børgesen: Nucl. Instr. Meth.B 5, 44–57 (1984)

    Google Scholar 

  31. O. Ellegaard, J. Schou, H. Sorensen, P. Børgesen: Surf. Sci.167, 474–492 (1986)

    Google Scholar 

  32. Average energy to produce an ion pair. ICRU Report 31. International commission on radiation units and measurements

  33. P. Sigmund: Phys. Rev.184, 383–416 (1969);187, 768 (1969)

    Google Scholar 

  34. B.J. Garrison, R.E. Johnson: Surf. Sci.148, 388–400 (1984)

    Google Scholar 

  35. M.J. Berger, S.M. Seltzer, K. Maeda: J. Atm. Terr. Phys.32, 1015–1045 (1970)

    Google Scholar 

  36. T.E. Everhart, P.H. Hoff: J. Appl. Phys.42, 5837–5846 (1971)

    Google Scholar 

  37. S. Valkealahti, R.M. Nieminen: Appl. Phys. A32, 95–106 (1983)

    Google Scholar 

  38. Z. Ophir, B. Raz, J. Jortner, V. Saile, N. Schwentner, E.E. Koch, M. Skibowski, W. Steinmann: J. Chem. Phys.62, 650–665 (1975)

    Google Scholar 

  39. D. Pudewill, F.J. Himpsel, V. Saile, N. Schwentner, M. Skibowski, E.-E. Koch, J. Jortner: J. Chem. Phys.65, 5226–5238 (1976)

    Google Scholar 

  40. H.S. Carslaw, J.C. Jaeger:Conduction of Heat in Solids (Clarendon, Oxford 1959)

    Google Scholar 

  41. P.G. Le Comber, R.J. Loveland, W.E. Spear: Phys. Rev.11, 3124–3130 (1975)

    Google Scholar 

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Author notes

  1. R. Pedrys

    Present address: Instytut Fizyki, Uniwersytet Jagiellonsk, PL-30-059, Krakow, Poland

  2. P. Børgesen

    Present address: Department of Materials Science and Engineering, Cornell, University, 14853, Ithaca, NY, USA

Authors and Affiliations

  1. Physics Department, Association EURATOM-Risa National Laboratory, DK-4000, Roskilde, Denmark

    O. Ellegaard, R. Pedrys, J. Schou, H. Sørensen & P. Børgesen

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  1. O. Ellegaard
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  4. H. Sørensen
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  5. P. Børgesen
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Ellegaard, O., Pedrys, R., Schou, J. et al. Sputtering of solid argon by keV electrons. Appl. Phys. A 46, 305–312 (1988). https://doi.org/10.1007/BF01210351

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