Abstract
Samples formed of a thin metal film deposited on silicon single crystal were annealed with electron and laser (ruby and excimer) pulses over a wide range of fluences. From a comparison of the experimental results with the temperature profiles of the irradiated samples, it turns out that suicide formation starts when the metal/silicon interface reaches the lowest eutectic temperature of the binary metal/silicon system. The growth rate of reacted layers is of the order of 1 m/s.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
S.P. Murarka:Silicides for VLSI Applications (Academic Orlando 1983)
G. Ottaviani: J. Vac. Sci. Technol.16, 1112 (1979)
S. Kritzinger, K.N. Tu: J. Appl. Phys.37, 205 (1980)
C.W. White, P.S. Peercy (eds.):Laser and Electron Beam Processing of Materials (Academic, New York 1980)
M. Von Allmen, S.S. Lau, M. Maenpaa, B.Y. Tsaur: Appl Phys. Lett.37, 84 (1980)
J.M. Liu, H. Kurz, N. Bloembergen: InLaser-Solid Interactions and Transient Thermal Processing of Materials, ed. by J. Narayan, W.L. Brown and R.A. Lemons (North-Holland, New York 1983) p. 3
A. Luches: InPhysical Processes in Laser-Materials Interactions, ed. by M. Bertolotti (Plenum, New York 1983) p. 443
J.M. Poate, H.J. Leamy, T.T. Sheng, G.K. Celler: Appl. Phys. Lett.33, 918 (1978)
M. Von Allmen, S.S. Lau: InLaser Annealing of Semiconductors, ed. by J.M. Poate, J.W. Mayer (Academic, New York 1982) p. 43
E. Armandillo, A. Luches, V. Nassisi, M.R. Perrone: Appl. Phys. Lett.42, 860 (1983)
A. Luches, V. Nassisi, A. Perrone, M.R. Perrone: Physica104C, 228 (1981)
E. D'Anna, G. Leggieri, A. Luches, V. Nassisi, A. Perrone, M.R. Perrone, R. Simmini: Vacuum TAIP35, 19 (1985)
G. Majni, F. Nava, G. Ottaviani, E. D'Anna, G. Leggieri, A. Luches, G. Celotti: J. Appl. Phys.52, 4055 (1981)
G. Majni, F. Nava, G. Ottaviani, A. Luches, V. Nassisi, G. Celotti: Vacuum TAIP32, 11 (1982)
F. Nava, G. Majni, A. Luches, V. Nassisi, E. Janniti: J. Physique5-C4, 97 (1980)
E. D'Anna, G. Leggieri, A. Luches, F. Nava: Thin Solid Films,110, 83 (1983)
E. D'Anna, G. Leggieri, A. Luches, M.R. Perrone, G. Majni, I. Catalano: InLaser Processing and Diagnostics, ed. by D. Bäuerle, Springer Ser. Chem. Phys.39 (Springer, Berlin, Heidelberg 1984) p. 370
J.E. Joung, J.S. Preston, H.M. van Driel, J.E. Sipe: Phys. Rev.27B, 1155 (1983)
R. Fastow, J.W. Mayer, T. Brat, M. Eizenberg, J.O. Olowolafe: Appl. Phys. Lett.46, 1052 (1985)