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The composition analysis of YBa2Cu3O7-δ or PrBa2Cu3O7-δ thin films and (YBa2Cu3O7-δ/PrBa2Cu3O7-δ)n heterostructures prepared by CVD

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Abstract

Some YBa2Cu3O7-δ films and heterostructures prepared by Chemical Vapor Deposition (CVD) were analyzed in our laboratories by EPMA-EDX or WDX, RBS, SNMS and AES. It was found that in some cases the results of composition analysis can significantly deviate from each other. At least two main reasons for these deviations exist: the different lateral resolution and the application of different reference samples for the calibration.

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Authors and Affiliations

  1. LMGP, INPG, CNRS, ENS de Physique de Grenoble, B.P. 46, F-38402 St Martin d’Heres Cedex, France, , , , , , FR

    C. Dubourdieu, N. Didier, O. Thomas & J. P. Sénateur

  2. LTPCM B.P. 46, F-38402 St Martin d’Heres Cedex, France, , , , , , FR

    N. Valignat

  3. Chemistry Department of Moscow State University, 119899 Moscow, Russia, , , , , , RU

    Y. Rebane, T. Kouznetsova & A. Gaskov

  4. Lehrstuhl f. Experimentalphysik IV, Institut für Physik, Universität Augsburg, Germany, , , , , , DE

    J. Hartmann & B. Stritzker

Authors
  1. C. Dubourdieu
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  2. N. Didier
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  3. O. Thomas
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  4. J. P. Sénateur
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  5. N. Valignat
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  6. Y. Rebane
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  7. T. Kouznetsova
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  8. A. Gaskov
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  9. J. Hartmann
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  10. B. Stritzker
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Additional information

Received: 3 June 1996 / Revised: 14 October 1996 / Accepted: 16 October 1996

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Dubourdieu, C., Didier, N., Thomas, O. et al. The composition analysis of YBa2Cu3O7-δ or PrBa2Cu3O7-δ thin films and (YBa2Cu3O7-δ/PrBa2Cu3O7-δ)n heterostructures prepared by CVD. Fresenius J Anal Chem 357, 1061–1065 (1997). https://doi.org/10.1007/s002160050305

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  • DOI: https://doi.org/10.1007/s002160050305

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