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Quadrupole mass spectrometer for residual gas analysis and SIMS application

  • Part I
  • Secondary Ion Mass Spectrometry
  • Published:
Fresenius' Journal of Analytical Chemistry Aims and scope Submit manuscript

Summary

A combined secondary ion optics has been developed which includes both the ion source for residual gas analysis and the secondary ion optics for Secondary Ion Mass Spectrometry (SIMS). The change from one mode to the other can be done by changing only the electric connections without venting the vacuum chamber. The presented combination of the two methods allows the interpretation of SIMS spectra with higher reliability.

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Authors and Affiliations

  1. Department of Atomic Physics, Technical University Budapest, Budafoki ut 8, H-1111, Budapest, Hungary

    Gy. Hárs, A. Sólyom & J. Giber

Authors
  1. Gy. Hárs
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  2. A. Sólyom
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  3. J. Giber
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Hárs, G., Sólyom, A. & Giber, J. Quadrupole mass spectrometer for residual gas analysis and SIMS application. Fresenius J Anal Chem 341, 57–59 (1991). https://doi.org/10.1007/BF00322107

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  • DOI: https://doi.org/10.1007/BF00322107

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