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Chemical analysis of thin semiconducting films using scanning auger electron spectroscopy

Chemische Analysen dünner Halbleiterschichten mit der Raster-Augerelektronenspektroskopie

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Literatur

  1. Herion J, Niekisch EA, Scharl G (1980) Solar Energy Mater 4:101–112

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Authors and Affiliations

  1. Institut für Festkörperforschung, Kernforschungsanlage Jülich GmbH, Postfach 1913, D-5170, Jülich, Federal Republic of Germany

    F. Birmans, J. Herion & G. Scharl

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  1. F. Birmans
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  2. J. Herion
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  3. G. Scharl
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Birmans, F., Herion, J. & Scharl, G. Chemical analysis of thin semiconducting films using scanning auger electron spectroscopy. Z. Anal. Chem. 314, 300 (1983). https://doi.org/10.1007/BF00516824

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  • DOI: https://doi.org/10.1007/BF00516824

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