Skip to main content
SpringerLink
Log in

Gas-sensor properties of SnO2 films implanted with gold and iron ions

  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

SnO2 gas-sensor films were modified by implantation of gold and iron ions. The change in electrical resistivity of the films caused by inflammable gases, H2, CO, CH4 and C2H5OH, was measured in the temperature range 100–500°C, and compared to non-implanted films. The morphological changes caused by gold and iron ion implantation were also investigated by atomic force microscopy. After ion implantation and annealing at 600°C, the sensitivity to H2 and CO gas was found to increase, and the dynamic range of the sensitivity to ethanol was improved. The sensitivity to CH4 was low before and after ion implantation. Fe2O3 (3%SnO2) film was also modified by gold ion implantation for comparison.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. N. TAGUCHI, Jpn Pat. S45-38200 (1970).

  2. Y. OKAYAMA, H. FUKAYA, K. KOJIMA, Y. TERASAWA and T. HANDA, in "Proceedings of the International Meeting on Chemical Sensors", edited by T. Seiyama, K. Fueki, J. Shiokawa and S. Suzuki, Fukuoka, Japan, September 1983, (Elsevier, Amsterdam–Oxford–New York–Tokyo, 1983) pp. 29–34.

    Google Scholar 

  3. N. MURAKAMI, Y. MATSUURA, K. TAKAHATA and K. IHOKURA, in "Proceedings of the 2nd International Meeting on Chemical Sensors", edited by J. L. Aucouturier, J. S. Cauhapé, M. Destriau, P. Hagenmuller, C. Lucat, F. Ménil, J. Portier and J. Salardenne, Bordeaux, France, July 1986, (Bordeaux Chemical Sensors, Bordeaux, 1986), pp. 268–9.

    Google Scholar 

  4. K. NOMURA, Y. UJIHIRA, S. S. SHARMA, A. FUEDA and T. MURAKAMI, J. Mater. Sci. 24 (1989) 937.

    Article  CAS  Google Scholar 

  5. S. S. SHARMA, K. NOMURA, and Y. UJIHIRA, ibid.

  6. Idem, J. Appl. Phys. 71 (1992) 2000.

    Article  CAS  Google Scholar 

  7. K. NOMURA, S. S. SHARMA and Y. UJIHIRA, Nucl. Instrum. Meth. Phys. Res. B76 (1993) 357.

    CAS  Google Scholar 

  8. T. KOBAYASHI, M. HARUTA, H. SANO and M. NAKANE, Sensors Actuators 13 (1988) 339.

    Article  CAS  Google Scholar 

  9. T. KOBAYASHI, M. HARUTA and H. SANO, Chem. Express 4 (1989) 217.

    CAS  Google Scholar 

  10. K. FUKUI and M. NAKANE, in "Proceedings of the 5th International Meeting on Chemical Sensors", edited by A. D’Amico and C. DiNatale, Rome, 11–14th July, 1994 (Elsevier Science, Lausanne, 1995) p. 620.

    Google Scholar 

  11. F. C. STEDILE, C. V. BARROS LEITE, W. H. SCHRIEINER and I. J. R. BAUMVOL, Thin Solid Films 190 (1990) 139.

    Article  CAS  Google Scholar 

  12. J. F. ZIEGLER, J. P. BIERSACK and U. LITTMARK, "The Stoppings and Range of Ions and Solids", (Pergamon, New York, 1985).

    Google Scholar 

  13. G. B. BARBI, J. P. SANTOS, P. SERRINI, N. GIBSON, M. C. HORRILLO and L. MANES, in "Proceedings of the 5th International Meeting on Chemical Sensors," edited by A. D’Amico and C. DiNatale, Rome, 11–14th, July, 1994) (Elsevier Science, Lausanne, 1995) p. 715.

    Google Scholar 

  14. S. P. KAYE, H. KHEYRANDISH and J. S. COLLIGON, Nucl. Instrum. Meth. Phys. Res. B61 (1991) 380.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. School of Engineering, The University of Tokyo, Hongo 7-3-1, Bunkyo-ku Tokyo, 113, Japan

    K NOMURA

  2. New Cosmos Electric Co. Ltd, Mitsuya-naka, 2-5-4, Yodogawa-ku Osaka, 432, Japan

    H SHIOZAWA  & T TAKADA

  3. Forshungszen Rossendorf e. V., Institut fur lonenstrahlphysik und Materialforschung, D-01314, Dresden, Germany

    H REUTHER  & E RICHTER

Authors
  1. K NOMURA
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. H SHIOZAWA
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. T TAKADA
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. H REUTHER
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. E RICHTER
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

NOMURA , K., SHIOZAWA , H., TAKADA , T. et al. Gas-sensor properties of SnO2 films implanted with gold and iron ions. Journal of Materials Science: Materials in Electronics 8, 301–306 (1997). https://doi.org/10.1023/A:1018535322380

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1018535322380

Keywords

Search

Navigation