Skip to main content
Log in

Polycrystalline carbon nitride β-C3N4 films synthesized by radio frequency magnetron sputtering

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

References

  1. A. Y. Liu and M. L. Cohen, Science 245 (1989) 8419.

    Article  Google Scholar 

  2. CHUNMING Niu, YUAN Z. Lu and C. M. Lieber, ibid. 261 (1993) 334.

    Article  CAS  Google Scholar 

  3. ZHONG-MIN Ren, YUAN-CHENG Du, ZHI-FENG Ying, YUAN-XUN Qiu, XIA-XING Xiong, JIA-DA Wu and FU-MING Li, Appl. Pys. Lett. 65 (1994) 1361.

    Article  CAS  Google Scholar 

  4. X. A. Zhao, C. W. Ong, Y. C. Tsang, Y. W. Wong, P. W. Chan and C. L. Choy, ibid. 66 (1995) 2652.

    Article  CAS  Google Scholar 

  5. KIN MAN Yu, M. L. Cohen, E. E. Haller, W. L. Hansen, A. Y. Liu and I. C. Wu, Phys. Rev. B 49 (1994) 5034.

    Article  CAS  Google Scholar 

  6. YIN-AN Li, ZE-BO Zhang, XIE Si-shen and YANG Guo-zhen, Chem. Phys. Lett. 247 (1995) 253.

    Article  CAS  Google Scholar 

  7. ZHANG Ze-bo, LI Yin-an, XIE Si-shen and YANG Guo-zhen, J. Mater. Sci. Lett. 14 (1995) 1742.

    Article  Google Scholar 

  8. SUNIL Kumar and T. L. Tansley, Solid State Commun. 88 (1993) 803.

    Article  CAS  Google Scholar 

  9. Tyan-ywan Yen and Chang-pin Chou, ibid. 95 (1995) 281.

    Article  CAS  Google Scholar 

  10. YAFEI Zhang, ZHONGHUA Zhou and HULIN Li, Appl. Phy. Lett. 68 (1996) 634.

    Article  CAS  Google Scholar 

  11. X. W. Su, H. W. Song, F. Z. Cui and W. Z. Li, J. Phys., Condens. Matter 7 (1995) L517.

    Article  CAS  Google Scholar 

  12. T. Okada, S. Yamada, Y. Takeuchi and T. Wada, J. Appl. Phys. 78 (1995) 7416.

    Article  CAS  Google Scholar 

  13. He-xiang Han and B. J. Feldman, Solid State Commun. 65 (1988) 921.

    Article  CAS  Google Scholar 

  14. Dong Li, Yip-wah Chung, Shengtian Yang, Ming-show Wong, Farshid Adibi and W. D. Sproul, J. Vac. Sci. Technol. A 12 (1994) 1470.

    Article  CAS  Google Scholar 

  15. L. J. Bellamy, in “The Infrared Spectra of Complex Molecules”, 2nd Edn (Wiley, New York, 1958).

    Google Scholar 

  16. M. R. Wixom, J. Am. Ceram. Soc. 73 (1990) 1686.

    Article  Google Scholar 

  17. H. Sjöström, L. Hultman, J. E. Sundgren, S. V. Hainsworth, T. F. Page and G. S. A. M. Theunissen, J. Vac. Sci. Technol. A 14 (1996) 56.

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Li, YA., Xu, S., Li, HS. et al. Polycrystalline carbon nitride β-C3N4 films synthesized by radio frequency magnetron sputtering. Journal of Materials Science Letters 17, 31–35 (1998). https://doi.org/10.1023/A:1006585422729

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1006585422729

Keywords

Navigation