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Properties of Zr-N thin films prepared by the ion and vapour deposition method

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Authors and Affiliations

  1. Institute of Physics, University of Sao Paulo, CP 66398, 05389-970, São Paulo-SP, Brazil

    M. Matsuoka

  2. R&D Division, Nissin Electric Company, Ltd, Ukyo-ku, 615, Kyoto, Japan

    N. Kuratani & K. Ogata

Authors
  1. M. Matsuoka
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  2. N. Kuratani
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  3. K. Ogata
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Matsuoka, M., Kuratani, N. & Ogata, K. Properties of Zr-N thin films prepared by the ion and vapour deposition method. J Mater Sci Lett 15, 1340–1342 (1996). https://doi.org/10.1007/BF00240801

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  • DOI: https://doi.org/10.1007/BF00240801

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