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Conversion process of chlorine containing polysilanes into silicon carbide

Part II Crystallization of the inorganic amorphous silicon carbide derived from chlorine containing polysilane

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Abstract

The crystallization of pyrolysed chlorine containing polycarbosilanes (PCS) into silicon carbide is suggested to begin at about 1000 °C by X-ray diffraction experiments. The crystallite size and the crystallite amount were also estimated from the X-ray diffraction patterns. Electron spin resonance, nuclear magnetic resonance and Raman-spectroscopy were used to describe the structure of the material. In addition to these methods a combustion method was used to investigate the carbon and the oxygen contents.

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Martin, H.P., Müller, E. & Brendler, E. Conversion process of chlorine containing polysilanes into silicon carbide. JOURNAL OF MATERIALS SCIENCE 31, 4363–4368 (1996). https://doi.org/10.1007/BF00356461

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  • DOI: https://doi.org/10.1007/BF00356461

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