Skip to main content
Log in

Influence of spherical indentor radius on the indentation-induced transformation behaviour of silicon

  • Papers
  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

The force-displacement records of the indentation of silicon single crystals have been monitored with an ultra-micro indentation system using spherical-tipped diamond indentors. The observations with indentors of different radii varying from nominally 5–20 μm all exhibited similar behaviour. At low loads, the behaviour was entirely elastic and exhibited complete reversibility. At slightly heavier loads the onset of non-linear behaviour occurred, which, in many cases, appeared to be completely reversible. In all the other cases at this and higher load levels, a “pop-out” event occurred during the unloading in what otherwise appeared to be an elastic unloading. The results are interpreted in terms of the indentation pressure-induced phase transformation from silicon-I to silicon-II on loading and to silicon-III upon unloading.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. N. A. Goryunova, A. S. Borshcherskii andC. N. Tretiakov, “Physics of III–V Compounds. Semi-Conductors and Semi-metals” (Academic Press, San Diego, 1968) Ch. 1.

    Google Scholar 

  2. I. V. Gridneva, Yu. V. Milman andV. I. Trefilev,Phys. Status. Solidi 9 (14) (1972) 177.

    Google Scholar 

  3. D. R. Clarke, M. C. Knoll, P. D. Kirchener, R. F. Cook andB. J. Hockey,Phys. Rev. Lett. 21 (1988) 2156.

    Google Scholar 

  4. G. M. Pharr, W. C. Oliver andD. R. Clarke,Scripta Metall 23 (1989) 1949.

    Google Scholar 

  5. Idem, J. Elect. Mater. 19 (1990) 881.

    Google Scholar 

  6. G. M. Pharr, in “Thin Films: Stresses and Mechanical Properties III”, edited by W. D. Nix, J. C. Bravman, E. Arzt and L. B. Freund (Materials Research Society Symposia Proceedings, Pittsburgh, PA, 1992)239, p. 301.

  7. J. J. Gilman,J. Mater. Res. 7 (1992) 535.

    Google Scholar 

  8. J. Z. Hu andI. L. Spain,Solid State Commun. 51 (1983) 263.

    Google Scholar 

  9. J. Z. Hu, L. D. Merkle, C. S. Menoni andI. L. Spain,Phys. Rev. B34 (1986) 4679.

    Google Scholar 

  10. T. F. Page, W. C. Oliver andC. J. McHargue,J. Mater. Res. 7 (1992) 450.

    Google Scholar 

  11. D. R. Clarke, private communication (1993).

  12. E. R. Weppelmann, J. S. Field andM. V. Swain,J. Mater. Res. 8 (1993) 830.

    Google Scholar 

  13. P. M. Sargent, in “Micro-indentation Techniques in Materials Science and Engineering”, edited by P. J. Blau and B. R. Lawn, ASTM STP 889 (American Society for Testing and Materials, Philadelphia, PA 1984) p. 160.

    Google Scholar 

  14. S. G. Roberts, PhD thesis. Cambridge University (1973).

  15. P. Feltham andR. Banerjee,J. Mater. Sci. 27 (1992) 1626.

    Google Scholar 

  16. K. L. Johnson, “Contact Mechanics” (Cambridge University Press, Cambridge, 1985).

    Google Scholar 

  17. I. N. Sneddon,Proc. Cambr. Philos. Soc. 44 (1949) 429.

    Google Scholar 

  18. J. S. Field andM. V. Swain,J. Mater. Res. 8 (1992) 297.

    Google Scholar 

  19. T. J. Bell, A. Bendeli, J. S. Field, M. V. Swain andE. G. Thwaite,Metrologia 28 (1991/92) 463.

    Google Scholar 

  20. H. Li andR. C. Bradt, private communication (1994).

  21. G. M. Pharr, W. C. Oliver andD. S. Harding,J. Mater. Res. 6 (1991) 1129.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Weppelmann, E.R., Field, J.S. & Swain, M.V. Influence of spherical indentor radius on the indentation-induced transformation behaviour of silicon. J Mater Sci 30, 2455–2462 (1995). https://doi.org/10.1007/BF01184600

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF01184600

Keywords

Navigation