Abstract
The radiofrequency plasma technique involving mixtures of CF4+O2 gases has been applied to the surface treatment of high Tc superconducting oxides (YBa2Cu3O7−δ). Investigation of the various experimental parameters of the process has shown that the improvement of the critical current density, J c, mainly depends on the inlet precursor composition CF4+τ%O2, on the total pressure and on the reaction time. The presence of fluorine in the bulk of the ceramics has been observed from electron microprobe analysis, together with an increase of the “Cu3+” content. The plasma-enhanced fluorination (PEF) treatment improves the superconducting properties of the materials: both values of the resistivity in the normal state and of the superconducting transition width are reduced and the critical transition temperature is improved by about 1 K.
Similar content being viewed by others
References
S. Jin, T. M. Tiefel and R. C. Sherwood, Phys. Rev. B37 (1987) 7850.
P. De Rango, PhD thesis, University J. Fourier, Grenoble (1992).
S. J. KEATING, I. WEI and T. Y. CHIEN, in “Ceramic Superconductors II”, (American Ceramic Society, 1988) p. 43.
J. M. Dance, A. Tressaud, B. Chevalier, J. Darriet and J. Etourneau, Solid State Ion. 32-33 (1989) 1188.
B. LEPINE, PhD thesis, University Bordeaux I (1990).
D. W. Hess, in “Microelectronic materials and processes”, edited by R. A. Levy (Kluwer Academic Press, New York, 1989) p. 459.
H. Bui, H. Carchano and D. Sanchez, Thin Solid Films 13 (1972) 207.
J. M. Heintz, C. Magro, J. P. Bonnet, K. Fröhlich and P. Dordor, J. Less-Common Metals 164–165 (1990) 1377.
C. MAGRO, PhD thesis, University Bordeaux I (1992).
C. P. Bean, Rev. Mod. Phys. 36 (1964) 31.
C. J. Mogab, J. Electrochem. Soc. 124 (1977) 1263.
I. C. Plumb and K. R. Ryan, Plasma Chem. Plasma Process. 6 (1986) 205.
SEONG-JU PARK, C. P. SUN and J. T. YEH, in “Proceedings of the Materials Research Society Symposium” Pittsburg, April 1986, edited by J. Coburn, R. A. Gottscho and D. W. Hess, Vol. 68 (1986) p. 65.
R. D'Agostino, F. Cramarossa, S. De Benedictis and G. Ferraro, J. Appl. Phys. 52 (1981) 1259.
A. T. Bell, J. Macromol. Sci. Chem. A10 (1976) 379.
G. TURBAN, PhD thesis, University Nantes (1981).
N. Mutsukura and G. Turban, Vacuum 39 (1989) 579.
R. D'Agostino, F. Cramarossa and F. Illuzzi, J. Appl. Phys. 61 (1987) 2754.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Magro, C., Tressaud, A., Lozano, L. et al. Plasma-enhanced fluorination of YBa2Cu3O7−δ ceramics. JOURNAL OF MATERIALS SCIENCE 29, 4225–4231 (1994). https://doi.org/10.1007/BF00414202
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/BF00414202