Skip to main content
SpringerLink
Log in

Evolution of well-defined surface contour submitted to ion bombardment: computer simulation and experimental investigation

  • Papers
  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

The previously published theory of our model on the evolution of a surface contour under ion etching is recalled. Further improvements dealing with angular points of the profile shows that: angular points having straight trajectory may exist; and they can be found either by computation or by graphic method.

The experimental verification of the model is made on steps etched in silicon. SEM observations of the evolution of such steps under argon ion bombardment show good agreement between computed and experimental results.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J. P. Ducommun, M. Cantagrel and M. Marchal, J. Mater. Sci. 9 (1974) 725.

    Google Scholar 

  2. M. J. Nobes, J. S. Colligon and G. Carter, ibid 4 (1969) 730.

    Google Scholar 

  3. G. Carter, J. S. Colligon and M. J. Nobes, ibid 6 (1971) 115.

    Google Scholar 

  4. C. Catana, J. S. Colligon and G. Carter, ibid 7 (1972) 467.

    Google Scholar 

  5. G. Carter, J. S. Colligon and M. J. Nobes, ibid 8 (1973) 1473.

    Google Scholar 

  6. D. J. Barber, F. C. Frank, M. Moss, J. W. Steeds, I. S. T. Tsong, ibid 8 (1973) 1030.

    Google Scholar 

  7. A. Teodorescu and F. Vasilu, Rad. Effects 15 (1972) 101.

    Google Scholar 

  8. H. I. Smith, R. C. Williamson and W. T. Brogan, I.E.E.E. Ultrasonics Symposium (1972) p. 198.

  9. F. C. Frank, “Growth and Perfection of Crystals” (Wiley, New York, 1958) p. 411. J. P. Ducommun, Thesis, Paris VI University (1974).

    Google Scholar 

  10. M. Cantagrel and M. Marchal, J. Mater. Sci. 8 (1973) 1711.

    Google Scholar 

  11. G. S. Anderson, J. Appl. Phys. 37 (1966) 3455.

    Google Scholar 

  12. N. Laegreid and G. K. Wehner, ibid 32 (1961) 365.

    Google Scholar 

  13. L. I. Maissel and R. Glang, “Handbook of thin film technology” (McGraw Hill, 1970) p. 4–40.

  14. A. D. G. Stewart and M. W. Thomson, J. Mater. Sci. 4 (1969) 56.

    Google Scholar 

  15. A. R. Bayly, ibid 7 (1972) 404.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Thomson-CSF, Laboratoire Central de Recherches, BP No 10, 91401, Orsay, France

    J. P. Ducommun, M. Cantagrel & M. Moulin

Authors
  1. J. P. Ducommun
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. Cantagrel
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. Moulin
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Ducommun, J.P., Cantagrel, M. & Moulin, M. Evolution of well-defined surface contour submitted to ion bombardment: computer simulation and experimental investigation. J Mater Sci 10, 52–62 (1975). https://doi.org/10.1007/BF00541031

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00541031

Keywords

Search

Navigation