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Depth profiling by ARXPS in surface analysis

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Abstract

A method of nondestructive depth profiling in near surface regions of solids is described. Models have been discussed from which algorithms for evaluation of measured data are obtained. The algorithms, based on standard profiles with free parameters, have been adjusted to the data resulting from angle resolved XPS (ARXPS) by means of least squares fits. Depth profile analyses and segregation studies were performed on Pt–Ni and Fe–S specimens.

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Authors and Affiliations

  1. Institut für Angewandte und Technische Physik, Technische Universität Wien, Wiedner Hauptstrasse 8-10, Wien, A-1040, Austria

    H. Fischer, R. Svagera, H. Ebel, M. F. Ebel & B. Schoßmann

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  1. H. Fischer
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  2. R. Svagera
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  3. H. Ebel
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  4. M. F. Ebel
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  5. B. Schoßmann
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Fischer, H., Svagera, R., Ebel, H. et al. Depth profiling by ARXPS in surface analysis. Fresenius J Anal Chem 353, 473–477 (1995). https://doi.org/10.1007/s0021653530473

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  • DOI: https://doi.org/10.1007/s0021653530473

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