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Title:
Infrared study on room-temperature atomic layer deposition of TiO2 using tetrakis(dimethylamino)titanium and remote-plasma-excited water vapor
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Applied Surface Science [0169-4332] Kanomata, K yr:2014
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Kanomata, K
Pansila, P
Ahmmad, B
Kubota, S
Hirahara, K
Hirose, F
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Pansila, P
Ahmmad, B
Kubota, S
Hirahara, K
Hirose, F
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Pansila, P
Ahmmad, B
Kubota, S
Hirahara, K
Hirose, F
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